Semiconductor manufacturing demands the highest levels of precision, process reliability, and contamination control.
Whether it’s wafer handling, lithography, or advanced inspection systems, every application pushes motion components to their limits: extreme accuracy, vacuum compatibility, and ultra-low particle emissions, sometimes even requiring the complete exclusion of certain materials.
Steinmeyer ball screws are engineered to meet these demands without compromise. Designed for cleanroom use, they deliver reliable performance in dynamic environments and maintain exceptional stability and lifespan even in compact, highly integrated systems.
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The perfect solution for every seminconductor system
Wafer production and handling
Processes like electron beam or EUV lithography demand maximum precision, stability, and material purity. Steinmeyer ball screws handle critical movements such as focus adjustments and wafer handling inside such cleanroom environments. Beyond their exceptional positioning accuracy, they stand out for their application-specific material configuration, engineered to minimize particle emission and eliminate contamination risks from dopants. Therefore they are the perfect fit for these highly sensitive manufacturing steps.
Inspection and metrology systems
When it comes to structural wafer inspection and high-precision measurements, every movement must be flawless. Steinmeyer ball screws provide precise feed and Z-axis positioning for sample stages and optical components. Built for cleanroom environments, they ensure smooth, vibration-free motion with exceptional accuracy and long-lasting reliability.
Assembly and Packaging equipment
In packaging applications like die attach, wire bonding, or flip-chip placement, fast and ultra-precise movement is essential. Steinmeyer ball screws enable sensitive alignment and feed motions—for example in pick-and-place axes or bonding heads. They support rapid cycle times with outstanding repeatability, even in continuous operation.
Why choose Steinmeyer ball screws
In semiconductor manufacturing, every detail counts. Even the tiniest contamination or deviation can disrupt processes, affect results, or lead to costly defects. That’s why it’s not just about precision — material quality and thoughtful design are equally critical.
Steinmeyer ball screws are engineered specifically to meet these high demands. They provide reliable, highly repeatable motion, whether operating in high vacuum, cleanrooms, or handling ultra-fine strokes. By carefully selecting materials, designing specialized nut geometries and customizing lubrication, Steinmeyer ensures these components perform flawlessly even in the most challenging conditions. This makes them indispensable for sensitive applications—from wafer production to optical inspection.
What makes the difference:
- Consistent precision thanks to flawless manufactured threads and application-specific preload settings
- Minimal particle emission through optimized material choices, with optional exclusion of defined doping elements
- Low outgassing and contamination-free operation using special lubricants and high-quality plastic components, with the option for completely lubricant- and plastic-free solutions in special cases
- Compact and efficient design featuring small nut geometries for highly integrated systems with tight installation spaces
- Optimized for vacuum and cleanroom applications thanks to tailored materials and application-specific lubrication concept
FAQ - Ball screws for semiconductor
Are Steinmeyer ball screws suitable for cleanroom applications?
With tailored designs using specialized materials and optimized lubricants, Steinmeyer ball screws can be engineered to meet the requirements of various cleanroom classes.
How do the ball screws perform regarding outgassing and particle generation?
For cleanroom use, Steinmeyer relies on low-outgassing lubricants and high-quality components that minimize particle generation. For specialized applications, completely lubricant- and plastic-free solutions are also available upon request.
Can Steinmeyer ball screws operate under radiation exposure?
By selecting appropriate materials and lubricants, Steinmeyer ball screws can be adapted for use under various radiation types, such as UV radiation.
Does Steinmeyer also offer complete systems or customized assemblies?
Steinmeyer Mechatronik designs and manufactures modular positioning systems and ready-to-install assemblies, including drive, sensors, and controls, tailored precisely to your application. As a result, you receive complete turnkey solutions for positioning and handling, custom-built to your specifications and ready for use right away.